Sheet resistance

Resistor based on the sheet resistance of carbon film

Sheet resistance is the resistance of a square piece of a thin material with contacts made to two opposite sides of the square.[1] It is usually a measurement of electrical resistance of thin films that are uniform in thickness. It is commonly used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, and glass coating. Examples of these processes are: doped semiconductor regions (e.g., silicon or polysilicon), and the resistors that are screen printed onto the substrates of thick-film hybrid microcircuits.

The utility of sheet resistance as opposed to resistance or resistivity is that it is directly measured using a four-terminal sensing measurement (also known as a four-point probe measurement) or indirectly by using a non-contact eddy-current-based testing device. Sheet resistance is invariable under scaling of the film contact and therefore can be used to compare the electrical properties of devices that are significantly different in size.

  1. ^ Dobkin, Daniel M. (2013-01-01), Dobkin, Daniel M. (ed.), "Chapter 5 - UHF RFID Tags", The RF in RFID (Second Edition), Newnes, pp. 189–237, ISBN 978-0-12-394583-9, retrieved 2023-02-23

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